SiC高温退火炉
♦ 适用领域：化合物半导体 Relevant Industries: Compound Semiconductors
♦适用材料：SiC Suitable for Processing: Silicon Carbide (SiC)
♦晶圆尺寸：8/6英寸 Wafer Size: 8/6 inch
♦适用工艺：高温退火(Annealing) Applicable Processes: High-Temperature Annealing Applicable process: Annealing of SiC and GaN wafers
