2025年7月31日，山东力冠微电子装备有限公司（以下简称“山东力冠”）正式宣布，其自主研发的首款12英寸（300mm）立式炉设备成功面市并投入市场。这是公司在高端半导体热处理设备领域取得的又一重大突破，彰显了山东力冠在推动核心半导体装备国产化替代道路上的坚实步伐与创新能力。
该款12英寸立式炉新品专为满足先进集成电路制造中对薄膜沉积、氧化、退火等关键高温工艺的严苛需求而设计。经过1000多个日夜持续的技术攻坚，10000多个小时的测试验证，山东力冠在多个核心性能指标上实现了显著提升：
精准的气体流量控制系统：
满足复杂工艺对气体配比和流量的精密控制要求。
优化的产能与可靠性：
设计旨在提升设备运行效率（UPH）和长期运行的稳定性，为客户降低综合拥有成本。
山东力冠负责人表示，“它不仅仅是一款新产品，更是我们解决半导体制造关键设备‘卡脖子’难题的决心体现。我们将持续加大研发投入，深耕核心技术，致力于为国内晶圆制造厂提供性能卓越、稳定可靠且更具竞争力的国产高端装备，为中国半导体产业的自主可控与升级发展贡献‘力冠’力量。”
该设备的成功研发与推出，不仅丰富了山东力冠在半导体前道设备领域的产品线，显著提升了公司在高端市场的竞争实力，更直接响应了当前国内半导体产业链对设备本土化的迫切需求。据悉，该设备即将进入国内主流芯片制造产线进行客户验证。
Localization Milestone Achieved! Shandong Liguan Launches Self-Developed 12-Inch Vertical Furnace.
July 31, 2025 – Shandong Liguan Microelectronics Equipment Co., Ltd. (hereinafter referred to as "Shandong Liguan") officially announces the successful market launch of its first independently developed 12-inch (300mm) vertical furnace, marking a significant breakthrough in high-end semiconductor thermal processing equipment. This achievement underscores the Company’s commitment to advancing localized alternatives for core semiconductor manufacturing equipment through innovation and technological prowess.
The 12-inch vertical furnace is designed for advanced IC manufacturing, addressing critical high-temperature processes such as thin-film deposition, oxidation, and annealing with stringent performance requirements. After 1,000+ days of R&D and 10,000+ hours of rigorous testing, the system demonstrates notable improvements in key specifications:
Superior Temperature Uniformity & Stability:
Ensures wafer-to-wafer (WTW) and within-wafer (WIW) process uniformity.
Precision Gas Delivery System:
Enables accurate gas mixing ratios and flow control for complex processes.
Enhanced Productivity & Reliability:
Optimized for high UPH and MTBF, reducing total cost of ownership (TCO).
A Company representative emphasized, "This is more than a new product—it represents our resolve to chokehold technologies in semiconductor equipment. We will continue to increase R&D investment, deepen core technological expertise, and provide domestic wafer fabs with high-performance, reliable, and competitive localized high-end solutions, contributing 'Liguan's strength' to China’s semiconductor self-sufficiency and industrial advancement."
The successful development and launch of this equipment not only expands Shandong Liguan’s product portfolio in front-end semiconductor equipment but also significantly strengthens its competitiveness in the high-end market. More importantly, it directly addresses the urgent need for equipment localization in China’s semiconductor supply chain. It is reported that the tool will soon enter customer validation in mainstream domestic chip production lines.
