山东力冠微电子装备

产品展示


蒙自VB/VGF设备

产品应用/Product Applications: ♦适用领域:单晶生长 Relevant Industries:Single Crystal Growth ♦适用材料:InP、GaAs等 Suitable for Processing: InP,GaAs, etc. ♦晶圆尺寸:8/6英寸 Wafer Size: 8/6 inch 技术指标/Technical Indicators: ♦制程温度范围:2200°C Process Temperature Range:2200°C ♦加热方式:感应/电阻 Heating Method:Induction/Resistance

类别:

蒙自VB/VGF设备

产品描述

产品应用/Product Applications:

♦适用领域:单晶生长

Relevant Industries:Single Crystal Growth

♦适用材料:InP、GaAs等

Suitable for Processing: InP,GaAs, etc.

♦晶圆尺寸:8/6英寸

Wafer Size: 8/6 inch

 

技术指标/Technical Indicators:

♦制程温度范围:2200°C

Process Temperature Range:2200°C

♦加热方式:感应/电阻

Heating Method:Induction/Resistance